The Discovery of III-V Oxidation, Device Progress, and Application to Vertical-Cavity Surface-Emitting Lasers
نویسنده
چکیده
The discovery of III-V oxidation and subsequent application of oxide technology to the fabrication of semiconductor lasers are reviewed. Work on lateral oxidation and the application of laterally oxidized layers to form optically and electrically confining apertures is discussed, as well as the commercially-significant use of lateral oxides in vertical-cavity surface-emitting lasers.
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